| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an optical reflection element unit in which the airtightness of a package of an optical reflection element is improved. Ž<P>SOLUTION: The optical reflection element unit is provided with: the optical reflection element 5 having a mirror part 6 and drive parts 7, 9 for vibrating the mirror part 6; the package 12 which includes the optical reflection element 5 and has an opening 20 above the mirror part 6; and a light transmissive part 13 which covers the opening 20 of the package 12 and has a curved shape having the convex upper side. The package 12 has a projection part 21 projecting from the periphery of the opening 20 into the upper part of the package 12. The light transmissive part 13 is disposed on the outside of the projection part 21 and a sealing material 23 is inserted into the space between the light transmissive part 13 and the projection part 21. As a result, the joining strength of the light transmissive part 13 to the package 12 can be increased and consequently the airtightness of the package 12 can be improved. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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