| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a surface inspection apparatus for an electrolytically refined metal deposition plate which photographs the surface of the metal deposition plate and automatically determines the grade of the metal deposition plate according to the sizes of nodules on the photographed surface and their distribution rate per surface. Ž<P>SOLUTION: The surface inspection apparatus for the electrolytically refined metal deposition plate 10 includes: an inspection unit 200 which photographs and inspects the metal deposition plate 10 which is intended to be inspected; a loading robot 300 which loads the metal deposition plate 10, which is intended to be inspected, onto the inspection unit; an unloading robot 400 which unloads the metal deposition plate 10 which has been inspected by the inspection unit 200; a conveyor 100 which conveys the metal deposition plate 10 which has been unloaded by the unloading robot 400; and a control unit which controls the inspection unit 200 and the actuation of these parts, and determines the grade of the metal deposition plate by the sizes and distribution of the nodules generated on the metal deposition plate 10 using an image of the metal deposition plate 10 photographed by the inspection unit 200. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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