| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an excimer discharge lamp having a longer lifetime than a conventional one, and a method for manufacturing the excimer discharge lamp. Ž<P>SOLUTION: The excimer discharge lamp is composed of a discharge container which includes a pair of flat plates opposed to through a discharge space, a pair of external electrodes which are installed on the outside of the pair of flat plates, and a light-emitting gas which is sealed in the discharge space and consists of at least rare gas, halogen or halide. The discharge container includes the sealed discharge space which is constructed of the pair of flat plates and sidewalls to connect the pair of flat plates, and the pair of flat plates and the sidewalls are made of sapphire, YAG, or single crystal yttria, and impurities existing in the inner surface of the discharge container surrounding the discharge space are an impurity containing at least any of silicon, carbon, cerium, and its quantity is 0.6 ng/cm<SP>2</SP>or less. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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