发明名称 |
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME |
摘要 |
PURPOSE: A semiconductor device and a manufacturing method thereof are provided to electronically connect semiconductor chips without additional bumps by simultaneously forming a conductive stud bump and a penetration silicone via on a wafer level chip. CONSTITUTION: An insulating layer(14) is attached to the upper and lower sides of a wafer level semiconductor chip(10). A plurality of first via holes(16) is formed on the insulating layer. A plurality of second via holes(18) is formed by penetrating the semiconductor chip. A conductive stud bump(20) is formed by coagulating the conductive metallic material which is charged in the first and second via holes. The sectional areas of the first via-holes are larger than those of the second via holes. |
申请公布号 |
KR20100057936(A) |
申请公布日期 |
2010.06.03 |
申请号 |
KR20080116565 |
申请日期 |
2008.11.24 |
申请人 |
AMKOR TECHNOLOGY KOREA, INC. |
发明人 |
GIM, BONG CHAN;CHA, SE WOONG |
分类号 |
H01L23/12;H01L23/48 |
主分类号 |
H01L23/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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