| 摘要 |
PROBLEM TO BE SOLVED: To detect a conveyance state of a thin sheet which is floated from a conveyance surface and conveyed in the conveyance direction by in-line, without the need of troublesome preparation. SOLUTION: Markers 9 are stuck on the thin sheet W conveyed by a floatation conveyance device 10, and are extracted from image data on an area A imaged by two cameras 3L, 3R arranged above the conveyance surface S. Three-dimensional position coordinate values (a coordinate value group) of the thin sheet W are detected from the three-dimensional position coordinate values of the markers to detect existence or non-existence or a portion in contact with the conveyance surface S of which three-dimensional position coordinate values (coordinate value group) are known by image processing. COPYRIGHT: (C)2010,JPO&INPIT
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