发明名称 METHOD FOR PRODUCING SEMICONDUCTOR CRYSTAL
摘要 <P>PROBLEM TO BE SOLVED: To obtain a high quality semiconductor crystal having few crystal defects with satisfactory reproducibility. Ž<P>SOLUTION: This method for producing a semiconductor crystal includes: providing a crucible 6 for growing the crystal in a furnace having a heater 3 for heating the crucible 6; bringing a semiconductor melt 5 accommodated in the crucible 6 into contact with a seed crystal 10 provided at the bottom part of the crucible 6, and then gradually solidifying the semiconductor melt 5 upward from the seed crystal 10 side. In the method, the growth of the semiconductor crystal 12 is allowed to proceed according to the movement of a heat ray-shielding tool 4 for shielding heat ray from the heater 3 to the crucible 6 by gradually moving the heat ray shielding tool 4 upward. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
申请公布号 JP2010120828(A) 申请公布日期 2010.06.03
申请号 JP20080298022 申请日期 2008.11.21
申请人 HITACHI CABLE LTD 发明人 SHIBATA MASATOMO
分类号 C30B11/00 主分类号 C30B11/00
代理机构 代理人
主权项
地址