发明名称 SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
摘要 A semiconductor device includes: a plurality of semiconductor substrates that are layered; a through electrode penetrating through a predetermined semiconductor substrate of the semiconductor substrates and electrically connected with an external terminal of the semiconductor device; a circuit element provided on the predetermined semiconductor substrate; and an electrostatic discharge protection circuit also provided on the predetermined semiconductor substrate. In the device, wiring resistance between the electrostatic discharge protection circuit and the through electrode is smaller than wiring resistance between the circuit element and the through electrode.
申请公布号 US2010133678(A1) 申请公布日期 2010.06.03
申请号 US20090627510 申请日期 2009.11.30
申请人 SEIKO EPSON CORPORATION 发明人 SAIKI TAKAYUKI;SATO SHINYA;TAKAMIYA HIROYUKI
分类号 H01L23/60;H01L21/70 主分类号 H01L23/60
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