| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezoelectric/electrostrictive film type element exhibiting an extremely high resonance frequency and a high response while having a bending displacement and durability equivalent to those of a conventional piezoelectric/electrostrictive film type element. <P>SOLUTION: The piezoelectric/electrostrictive film type element 10 comprises a ceramic substrate 44, and a piezoelectric/electrostrictive operating section 78 obtained by forming a lower electrode 77, a piezoelectric/electrostrictive layer 73 and an upper electrode 75 sequentially on the substrate 44 such that the piezoelectric/electrostrictive layer 73 covers the upper surface of the lower electrode 77 and the lower surface of the upper electrode 75 while projecting the end part thereof. Projecting part of the piezoelectric/electrostrictive layer 73 is coupled with the substrate 44 through a coupling material 70 composed of a hybrid material produced by scattering inorganic particles into a matrix of a polymer compound. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
