发明名称 Circuit element having capacitor and field effect transistor comprising nanowires
摘要 In a circuit device having a field effect transistor and a capacitor, the capacitor is connected to at least one of a gate electrode (24), a source electrode (21) and a drain electrode (22) of a field effect transistor, the field effect transistor has a channel comprised of a first nano-wire (20), and the capacitor comprises a first electrode (8) comprised of a second nano-wire having electroconductivity, a dielectric layer (9) partly covering the peripheral face of the first electrode (8) and a second electrode (10) covering the peripheral face of the dielectric layer (9). The circuit device is used in DRAMs, TFTs, and displays.
申请公布号 EP1796162(A3) 申请公布日期 2010.06.02
申请号 EP20060123391 申请日期 2006.11.02
申请人 CANON KABUSHIKI KAISHA 发明人 SHIOYA, SHUNSUKE;IKEDA, SOTOMITSU
分类号 H01L21/8242;H01L21/02;H01L27/108;H01L27/12;H01L27/13;H01L27/32;H01L29/06;H01L29/94 主分类号 H01L21/8242
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