发明名称 Semiconductor device having a driver TFT and a pixel TFT on a common substrate
摘要 <p>A semiconductor device having high reliability, in which TFTs with appropriate structures for the circuit functions are arranged, is provided. Gate insulating films (115) and (116) of a driver TFT are designed thinner than a gate insulating film (117) of a pixel TFT in a semiconductor device having a driver circuit and a pixel section on the same substrate. In addition, the gate insulating films (115) and (116) of the driver TFT and a dielectric (118) of a storage capacitor are formed at the same time, so that the dielectric (118) may be extremely thin, and a large capacity can be secured. <IMAGE></p>
申请公布号 EP1020920(B1) 申请公布日期 2010.06.02
申请号 EP19990126226 申请日期 1999.12.30
申请人 SEMICONDUCTOR ENERGY LABORATORY CO., LTD. 发明人 YAMAZAKI, SHUNPEI;KOYAMA, JUN;SHIBATA, HIROSHI;FUKUNAGA, TAKESHI
分类号 H01L27/12;G02F1/1362;H01L21/336;H01L21/77;H01L21/84;H01L27/13;H01L29/04;H01L29/423;H01L29/786 主分类号 H01L27/12
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