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发明名称
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申请公布号	JP4470920(B2)	申请公布日期	2010.06.02
申请号	JP20060202914	申请日期	2006.07.26
申请人		发明人
分类号	H01L21/762;H01L21/76;H01L27/12;H01L29/786	主分类号	H01L21/762
代理机构		代理人
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地址

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