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发明名称
HERSTELLUNGSVERFAHREN FÜR EINE BRUCHZONE IN EINEM SUBSTRAT DURCH KOIMPLANTATION
摘要
申请公布号
DE60332261(D1)
申请公布日期
2010.06.02
申请号
DE20036032261
申请日期
2003.10.31
申请人
COMMISSARIAT A L'ENERGIE ATOMIQUE
发明人
ASPAR, BERNARD;LAGAHE, CHRISTELLE;SOUSBIE, NICOLAS;MICHAUD, JEAN-FRANCOIS
分类号
H01L21/762;H01L21/265
主分类号
H01L21/762
代理机构
代理人
主权项
地址
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