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发明名称
METHOD FOR RECIPROCATING A WORKPIECE THROUGH AN ION BEAM
摘要
申请公布号
EP1738394(B1)
申请公布日期
2010.06.02
申请号
EP20050736389
申请日期
2005.04.05
申请人
AXCELIS TECHNOLOGIES, INC.
发明人
VANDERPOT, JOHN;BERRIAN, DONALD;POLLACK, JOHN
分类号
H01L21/687;H01J37/317;A61N5/00;B65H1/00;H01L21/00
主分类号
H01L21/687
代理机构
代理人
主权项
地址
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