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发明名称
Einkristalline epitaktische Siliciumscheibe und Verfahren zu ihrer Herstellung
摘要
申请公布号
DE69942263(D1)
申请公布日期
2010.06.02
申请号
DE1999642263
申请日期
1999.05.11
申请人
SHIN-ETSU HANDOTAI CO. LTD.
发明人
TAMATSUKA, MASARO;AIHARA, KEN;YOSHIDA, TOMOSUKE
分类号
C30B15/00;C30B29/06
主分类号
C30B15/00
代理机构
代理人
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地址
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