发明名称 Method and apparatus for fabricating self-assembling microstructures
摘要 A method and apparatus for assembling microstructures onto a substrate through fluid transport. The microstructures being shaped blocks self-align into recessed regions located on a substrate such that the microstructure becomes integral with the substrate. The improved method includes a step of transferring the shaped blocks into a fluid to create a slurry. Such slurry is then dispensed evenly or circulated over the top surface of a substrate having recessed regions thereon. The microstructure via the shape and fluid tumbles onto the surface of the substrate, self-aligns, and engages into a recessed region.
申请公布号 US7727804(B2) 申请公布日期 2010.06.01
申请号 US20070810937 申请日期 2007.06.06
申请人 THE REGENTS OF THE UNIVERSITY OF CALIFORNIA 发明人 SMITH JOHN STEPHEN
分类号 H01L21/50;G02F1/136;G02F1/1362;G02F1/1368;H01L21/58;H01L21/68;H01L21/98;H01L23/13;H01L23/14;H01L25/065;H01L29/06;H01S5/022;H01S5/40 主分类号 H01L21/50
代理机构 代理人
主权项
地址