SELECTIVITY CONTROL IN A PLASMA PROCESSING SYSTEM,申请号IL20060176466-传众专利搜索

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发明名称	SELECTIVITY CONTROL IN A PLASMA PROCESSING SYSTEM
摘要
申请公布号	IL176466(A)	申请公布日期	2010.05.31
申请号	IL20060176466	申请日期	2006.06.21
申请人	LAM RESEARCH CORPORATION;KENJI TAKESHITA;ODETTE TURMEL;FELIX KOZAKEVICH;ERIC HUDSON	发明人	KENJI TAKESHITA;ODETTE TURMEL;FELIX KOZAKEVICH;ERIC HUDSON
分类号	H01L21/311;H01L21/768	主分类号	H01L21/311
代理机构		代理人
主权项
地址

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