PHOTO RESIST DISPENSE MONITORING SYSTEM

摘要

PURPOSE: A setting value is especially automatically controlled the recipe if the photoresist solution quantitative discharge monitoring system inputs the initial setting value. The quantitative discharge whether or not of the photoresist solution is more readily the monitoring. CONSTITUTION: The photoresist solution storage tank accepts the photoresist solution. The feed pump lets deliver compulsory the photoresist solution to the feeding line. The filter collects the foreign material of the photoresist solution flowing through the feeding line. The photo resist supply system(10) comprises the flow measurement sensor measuring the supply quantity of the photoresist solution. It collects the recipe information from the photo resist supply system and the information collecting part(20) transfers to the central control part(30).