| 摘要 |
PURPOSE: It leaves the phase difference inside the fluid dispenser and the fluid dispenser for the silicon wafer polisher minimizes the fluid flux declination in multi-domain. The wafer polishing amount is uniformly and the plane improves the quality. CONSTITUTION: The distributor main body of cylindrical is prepared. The fluid inlet tube(110) flows in the fluid as the distributor inner part of the main body. The distribution pipe(130) is installed in the lower part of the distributor main body. The distribution pipe transfers the flowing fluid to the necessary location the respective dispersion. It nears, in the lower part of the distributor main body, the central part(122) forms the level difference than the peripheral part(121) towards the fluid inlet tube.
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