| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate levitation device and a substrate inspecting apparatus, of which the height of a holding member for holding a substrate is easily adjusted. SOLUTION: The substrate levitation device includes a levitation stage 2 for levitating a substrate, a holding member 3 which is arranged at the periphery of the levitation stage 2 or near it, and is energized upward by an elastic force to hold the substrate from below, and a height adjusting part 4 for adjusting the height of the holding member 3. COPYRIGHT: (C)2010,JPO&INPIT |
