发明名称 APPARATUS FOR TRANSFERRING A GLASS AND APPARATUS FOR PROCESSING A GLASS INCLUDING THE SAME
摘要 PURPOSE: A substrate transfer apparatus and a substrate processing apparatus including the same are provided to reduce the number of rotating shafts and to smoothly transfer a substrate. CONSTITUTION: A substrate transfer apparatus(100) comprises: a first rotary shaft(200) and a second rotary shaft(300) which are parallelly arranged each other and include a plurality of first protrusions and a plurality of second protrusions; and a conveyor belt(400) which is wound in the first rotary shaft and the second rotary shaft. The conveyor belt has grooves which are combined with the first protrusions and the second protrusions in the inner part which is contacted while rotating the first rotary shaft and the second rotary shaft.
申请公布号 KR20100055821(A) 申请公布日期 2010.05.27
申请号 KR20080114701 申请日期 2008.11.18
申请人 SEMES CO., LTD. 发明人 CHOI, JEONG YEOL
分类号 B65G49/06;B65G15/08;B65G49/07;H01L21/68 主分类号 B65G49/06
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