MODULE FOR TRANSFERRING A SUBSTRATE AND APPARATUS FOR PROCESSING A SUBSTRATE HAVING THE SAME

摘要

PURPOSE: A substrate transfer module and a substrate processing apparatus including the same are provided to reduce manufacturing costs and to reduce particle generation. CONSTITUTION: A substrate transfer module(100) comprises: a substrate transfer chamber(102) which is extended to the horizontal direction and offers a space in which a substrate(20) is transferred; a transfer base(104) which is arranged in the substrate transfer chamber and transfers the substrate; a support unit which is arranged on the transfer base and supports the substrate; and a horizontal driving unit(120) which horizontally transfers the transfer base in a load/unload zone and in a transferring zone.