| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical semiconductor device that can stably operate by reducing the reflection of light rays on an isolation groove. SOLUTION: The optical semiconductor device includes: an optical semiconductor element 10 including an optical waveguide core layer 14; and first and second anode electrodes 20 and 22 lined up on an upper surface of the optical semiconductor element 10 along an extending direction of the optical waveguide core layer 14. On the upper surface of the optical semiconductor element 10, the isolation groove 26 for enhancing isolation resistance between the first anode electrode 20 and second anode electrode 22 is provided between the first anode electrode 20 and second anode electrode 22. The isolation groove 26 has a first wall surface 32 on the side of the first anode electrode 20 and a second wall surface 34 on the side of the second anode electrode 22. The angle between the normal line N of the first and second wall surfaces 32 and 34 and the extending direction of the optical waveguide core layer 14 is≥6°and <90°. COPYRIGHT: (C)2010,JPO&INPIT |
