| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a vapor-deposition apparatus which can easily vapor-deposit a vapor-deposition material on a substrate having a larger size than a vapor-deposition mask, with the use of a mask having a high definition, and to provide a method for manufacturing an organic EL display device. Ž<P>SOLUTION: The vapor-deposition apparatus includes: a vapor-deposition chamber 1; a vapor-deposition mask 2 having a smaller size than that of the film-formed region of the substrate; a vapor-deposition source 3 which deposits the vapor-deposition material on a region to be film-formed through the vapor-deposition mask; a transfer mechanism which moves a relative position between the substrate, and the vapor-deposition mask and the vapor-deposition source; and a control section 5. The control section 5 operates the transfer mechanism, moves the relative position between the substrate, and the vapor-deposition mask and the vapor-deposition source, step by step, and makes the region to be film-formed deposited with the vapor-deposition material while dividing the region into a plurality of areas. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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