| 摘要 |
<P>PROBLEM TO BE SOLVED: To achieve a phased array probe for improving the accuracy for detecting a defect which has a complicated defect section and its depth position is unknown. Ž<P>SOLUTION: A method for determining a specification of the phased array probe arrays a plurality of piezoelectric elements 12, forms a flaw inspection section 10, and is used for a detection of the defect in an object to-be-inspected 106 including a single material and having the unknown depth position h of the defect. In the method, evaluation factors are ultrasonic convergent diameters g1, g2 representing ultrasonic convergences. Control factors are the total length L and a width l of the flaw inspection section 10, the number n of the piezoelectric elements, and a curvature r of the surface of the flaw inspection section 10 contacting the object 106 to-be-inspected. Error factors are the flaw inspection depth position h, and a flaw inspection refractive angle θ. An experimental planning method sets a plurality of design values in which the error factors and the control factors become different within a range of a potential fluctuation width of the error factors, estimates the design value in which the sensitivity S obtained from an average of the convergent diameters calculated from the design values is small and a SN ratio η representing a variation of the convergent diameters is large, and determines values of the control factors based on the design value selected by a confirmation calculation. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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