发明名称 |
METHOD AND SYSTEM FOR MEASURING PHYSICAL PARAMETERS WITH A PIEZOELECTRIC BIMORPH CANTILEVER IN A GASEOUS OR LIQUID ENVIRONMENT |
摘要 |
A piezoelectric bimorph cantilever is used for determining physical parameters in a gaseous or liquid environment. The sensor works as a driven and damped oscillator. Contrary to common cantilever sensor systems, the piezoelectric film of the bimorph cantilever acts as both a sensor and an actuator. Using at least two resonance mode of the bimorph cantilever, at least two physical parameters can be measured simultaneously in a gas or a liquid. An optimized piezoelectric cantilever and a method to produce the cantilever are also described.
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申请公布号 |
US2010129920(A1) |
申请公布日期 |
2010.05.27 |
申请号 |
US20090621229 |
申请日期 |
2009.11.18 |
申请人 |
IMEC;UNIVERSITEIT HASSELT |
发明人 |
MORTET VINCENT;PETERSEN RAINER |
分类号 |
G01N33/00;G01L11/00;G01N29/02 |
主分类号 |
G01N33/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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