MULTI CHIP STACKING WITH RELIABLE JOINING

摘要

The present invention relates to a method of multi chip stack bonding. A resin mixture is applied to a chip wafer and the chip wafer is heated until the resin mixture has solidified. The chip wafer is fragmented into individual chips and the individual chips are pre-stacked with alignment into a multi-chip stack in a joining process. Pressure and heating is applied to the multi-chip stack until the joining process is completed.