DEVICE AND METHOD FOR COATING A SUBSTRATE USING CVD

摘要

The invention relates to a device for coating a substrate using CVD, in particular for coating with diamond or silicon, wherein a heat conductor array composed of a plurality of elongated heat conductors (2) is provided in a housing (9), said heat conductors extending between a first (1) and a second electrode (6), wherein the heat conductors are held individually tensioned by a weight (4) attached to one end thereof. To increase the life of the heat conductors (2), the invention proposes that the weight (4) or the heat conductor (2) be guided at the second electrode (6), forming an electrical loop contact, in such a way that a vector of the weight force (G) produced by the weight (4) makes an angle (a) of no more than 45° with a direction of the longitudinal extension of the heat conductor (2).