摘要 |
A method of operating a micro-electromechanical system, comprising a resonator; an actuation electrode; and a first detection electrode, to filter and mix a plurality of signals. The method comprises applying a first alternating voltage signal to the actuation electrode, wherein an actuation force is generated having a frequency bandwidth that is greater than and includes a resonant bandwidth of a mechanical frequency response of the resonator, and wherein a displacement of the resonator is produced which is filtered by the mechanical frequency response and varies a value of an electrical characteristic of the first detection electrode. The method also comprises applying a second alternating voltage signal to the first detection electrode, wherein the second voltage signal is mixed with the varying value to produce a first alternating current signal. The first alternating current signal is detected at the first detection electrode. |
申请人 |
NXP B.V.;STEENEKEN, PETER, GERARD;VAN BEEK, JOZEF, T.M;REIMANN, KLAUS |
发明人 |
STEENEKEN, PETER, GERARD;VAN BEEK, JOZEF, T.M;REIMANN, KLAUS |