MICRO-ACTUATOR WITH LARGE DISPLACEMENT AND HIGH OPERATION SPEED AND MANUFACTURING METHOD THEREOF

摘要

A microactuator includes a substrate whose one end is fixed; a phase change film which is deposited on the substrate and has a high phase change rate, high strain and high stress during phase change; a protective film deposited on the phase change film; and a current pulse supply unit for supplying thermal energy to induce the phase transition of the phase change film, wherein the other end of the substrate is moved due to changes of the volume and residual stress of the phase change film accompanied by the phase transition thereof. The phase change film is made of a chalcogenide phase change material.