| 摘要 |
PURPOSE: A bubble sensing device for photosensitive solution pipes is provided to prevent the defects of the pattern formed on the wafer surface by previously perceiving the existence of the bubble in the solution before supplying the solution to the wafer. CONSTITUTION: A bubble sensing device for photosensitive solution pipes comprises a light-emitting part(11), a light-receiving part(12), a controller(20), and an alarm part(30). The light-emitting part and the light-receiving part face each other and are spaced. The light-receiving part senses the light generated from the lighting-emitting part. The controller is connected to the light-receiving part and transfers the light reaching the light-receiving part as a signal. The alarm part is connected to the controller and if a signal is transferred from the light-receiving part, then the alarm part outputs the signal as a bubble sensing signal. |
