| 摘要 |
PROBLEM TO BE SOLVED: To prevent a protective wire net arranged in a suction port for checking the inflow of foreign matter from causing a contact accident with a rotor and a moving blade by buckling caused by the thermal expansion by a temperature gradient, in a molecular pump having a structure for arranging the suction port of exhaust gas in close vicinity to the rotor. SOLUTION: A tip part of a wire element 6a of the long side of adjacent rectangles is crossed at a right angle in a T shape with a central part of the wire element 6a of the long side of the respective rectangles composed of a large number of rectangular meshes 6c, The protective wire net 6 having a zigzag mesh pattern is formed by alternately continuously connecting these rectangles. The protective wire net 6 is arranged in a suction port part 5a of a turbo-molecular pump 1. COPYRIGHT: (C)2010,JPO&INPIT |
