| 摘要 |
<P>PROBLEM TO BE SOLVED: To perform highly-accurate optical interference measurement of a complicated and rotationally-symmetric shape of a test surface. Ž<P>SOLUTION: The relative attitude of the test surface 80 is sequentially changed from a reference attitude where a surface central axis C is aligned with a measurement optical axis L such that the measurement optical axis L is sequentially moved to a plurality of annular regions obtained by dividing the test surface 80 in a diametric direction. The test surface 80 is rotated on a rotation axis E whenever the relative attitude is changed. Measurement light composed of a plane wave is radiated to the rotating test surface 80, and a one-dimensional image sensor 32 captures interference fringes classified by each rotational position at each of a plurality of rotational positions. The shape information classified by each annular region is calculated on the basis of the captured interference fringes at each rotational position, and the shape information is connected to calculate the shape information of the entire measurement region. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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