| 摘要 |
<P>PROBLEM TO BE SOLVED: To miniaturize a scanning mechanism and to reduce a scanning time thereof in a two-dimensional colorimeter used as an inspection device for a display. Ž<P>SOLUTION: Light input from a two-dimensional measuring target object 2 through an objective lens 3 is sequentially incident on filters 7X, 7Y, 7Z by a micromirror array 4 formed of a DMD or MEMS having a plurality of micromirrors 4a arranged in a two-dimensional structure. The transmitted light is imaged at one point of an imaging position by image-forming lenses 8X, 8Y, 8Z. The light intensity is measured by means of a common use two-dimensional array sensor 9, and an arithmetic operation section 10 determines chromaticities x, y of respective points in the two-dimensional measuring target object. Accordingly, miniaturization of the scanning mechanism and reduction of a measuring (scanning) time period thereof can be achieved. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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