发明名称 LASER-SCRIBING TOOL ARCHITECTURE
摘要 The present disclosure relates to apparatuses and systems for laser scribing a vertically-oriented workpiece. In many embodiments, a laser-scribing apparatus (30, 60) includes a frame, a first fixture (32) coupled with the frame, a second fixture (34) coupled with the frame, a laser (96, 100) operable to generate output able to remove material from at least a portion of the workpiece (36), and a scanning device (106) coupled with the laser (96, 100) and the frame. The first fixture (32) is configured for engagement with a first portion of the workpiece (36). The second fixture (34) is configured for engagement with a second portion of the workpiece (36). When the workpiece (36) is engaged by the first and second fixtures the workpiece (36) is substantially vertically oriented. The scanning device (106) is operable to control a position of the output from the laser (96, 100) relative to the workpiece (36).
申请公布号 WO2010059595(A2) 申请公布日期 2010.05.27
申请号 WO2009US64720 申请日期 2009.11.17
申请人 APPLIED MATERIALS, INC.;MANENS, ANTOINE, P.;HSU, WEI-YUNG 发明人 MANENS, ANTOINE, P.;HSU, WEI-YUNG
分类号 H01L21/78;H01L31/042 主分类号 H01L21/78
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