发明名称 |
APPARATUS OF MANUFACTURING A PLAT PANEL DISPLAY |
摘要 |
PURPOSE: A flat display device manufacturing apparatus is provided to maintain a substrate transferred by a rotation shaft with a constant temperature by heating the rotation shaft formed on a transfer unit. CONSTITUTION: A transfer unit(11) includes a plurality of rotation shafts arranged with the same space in the same direction. The transfer unit transfers a substrate(G) loaded on the rotation shafts. The transfer unit includes a roller and a driver. The roller is respectively mounted on the rotation shafts. The driver rotates the rotation shafts. A first heating unit(15) is connected to the rotation shafts of the transfer unit and heats the rotation shafts.
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申请公布号 |
KR20100055796(A) |
申请公布日期 |
2010.05.27 |
申请号 |
KR20080114672 |
申请日期 |
2008.11.18 |
申请人 |
SEMES CO., LTD. |
发明人 |
PARK, JONG HO;HAM, SEUNG WON |
分类号 |
H01L21/68;G02F1/13 |
主分类号 |
H01L21/68 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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