发明名称 APPARATUS OF MANUFACTURING A PLAT PANEL DISPLAY
摘要 PURPOSE: A flat display device manufacturing apparatus is provided to maintain a substrate transferred by a rotation shaft with a constant temperature by heating the rotation shaft formed on a transfer unit. CONSTITUTION: A transfer unit(11) includes a plurality of rotation shafts arranged with the same space in the same direction. The transfer unit transfers a substrate(G) loaded on the rotation shafts. The transfer unit includes a roller and a driver. The roller is respectively mounted on the rotation shafts. The driver rotates the rotation shafts. A first heating unit(15) is connected to the rotation shafts of the transfer unit and heats the rotation shafts.
申请公布号 KR20100055796(A) 申请公布日期 2010.05.27
申请号 KR20080114672 申请日期 2008.11.18
申请人 SEMES CO., LTD. 发明人 PARK, JONG HO;HAM, SEUNG WON
分类号 H01L21/68;G02F1/13 主分类号 H01L21/68
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