发明名称 INGOT GROWING APPARATUS AND METHOD HAVING SAME
摘要 PURPOSE: An ingot growing device and a growing method thereof are provided to improve durability of a crucible by discharging the grown ingot from a growth chamber rapidly. CONSTITUTION: A growth chamber(110) includes a growing unit(120) and a cooling unit. The growing unit grows an ingot. The cooling unit cools the grown ingot from the growing unit. A door(150) opens and closes between the growing unit and the cooling unit. The door closes between the growing unit and the cooling unit when the ingot is positioned on the cooling unit after the ingot is grown.
申请公布号 KR20100055790(A) 申请公布日期 2010.05.27
申请号 KR20080114664 申请日期 2008.11.18
申请人 SILTRON INC. 发明人 HWANG, JUNG HA;LEE, HONG WOO;KIM, SANG HEE
分类号 H01L21/20 主分类号 H01L21/20
代理机构 代理人
主权项
地址