| 摘要 |
PURPOSE: A dry module for manufacturing a flat display device is provided to improve a process speed by performing a photolithography process with an in-line method. CONSTITUTION: A processing chamber is arranged between baking modules to harden a coating module and a coating material. A solvent is removed from the coating material by drying the substrate coated with the coating material in the process chamber. A plate is arranged inside the process chamber and receives a substrate(12). A transfer unit(160) carries in the substrate from the coating module into the plate along the same plane. The transfer unit takes out the substrate from the plate to the baking module along the same plane.
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