APPARATUS OF ABSORBING VIBRATION AND APPRATUS OF PROCESSING SUBSTRATE HAVING THE SAME

摘要

PURPOSE: A vibration absorbing device and a substrate processing device including the same are provided to easily absorb the vibration generated from a vibration source by preventing a fixing unit to fix the vibration source to the bottom from being damaged. CONSTITUTION: A fixing unit(20) is combined with the vibration source and is fixed to the bottom. A vibration absorbing unit(30) is made of elastic materials and is interposed between a fixing unit and the part of the vibration source connected to the fixing unit. A fixing member is combined with the fixing unit and the bottom and fixes the fixing unit to the bottom. A larger penetration hole(35) than the fixing member is formed on the fixing unit and the vibration absorbing unit in response to the position of the fixing member.