UNIFORM THIN FILM PRODUCED BY MAGNETORHEOLOGICAL FINISHING

摘要

PROBLEM TO BE SOLVED: To provide an improved method for producing a thin layer having highly uniform thickness to be pre-coated on a lower surface of a substrate element. SOLUTION: A working layer 70 of a material is formed to have a thickness 74 greater than the desired final thickness 78. An areal (XY) determination of working layer thickness is made by ellipsometry, laser interferometry or x-ray diffraction or other known means. A map of thickness to be removed from the free surface of the working layer 70 is input into the control system of a magnetorheological finishing apparatus. The working layer 70 is mounted on a workpiece holder of the apparatus and correctly indexed to the machine. The machine then removes the material by magnetorheological finishing as instructed by the control system to leave a residual layer having a very high degree of thickness uniformity at a nominal average thickness and a very high surface integrity. COPYRIGHT: (C)2010,JPO&INPIT