NOZZLE SUBSTRATE, LIQUID DROPLET EJECTING HEAD, LIQUID DROPLET EJECTING APPARATUS, AND METHOD FOR MANUFACTURING THE SAME

摘要

<P>PROBLEM TO BE SOLVED: To provide a nozzle substrate or the like which has no dishing shape on the periphery of an ejection opening and can obtain a stable ejection characteristic. Ž<P>SOLUTION: In the nozzle substrate 30 formed of silicon in which nozzles 31 for ejecting a liquid are formed by penetrating a plate, the nozzle 31 is made to have the ejection opening projected from a surface of the substrate to prevent the ejection opening periphery from being a dented dishing shape (round shape) on an ejection surface of liquid droplets. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž