| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a fine pattern correction method capable of preventing generation of fine cracks. Ž<P>SOLUTION: Power density of a laser beam in the fine pattern correction method is lowered by preparing an objective lens 34 at a designated position at first. Then, when the objective lens 34 reaches to a designated focal position by gradually lowering the objective lens 34 and designated power density is obtained, calcination is carried out. When terminating the calcination, the objective lens 34 is reversely moved upward to a designated defocusing position, and a diameter of a laser spot is gradually widened. Consequently, temperature on a fine patter can be smoothly changed. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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