| 摘要 |
PURPOSE: A cleaning solution spraying nozzle and a substrate cleaning apparatus are provided to reduce the using amount of air and a cleaning solution for cleaning a substrate by uniformly spraying the cleaning solution to the substrate. CONSTITUTION: A cleaning solution spraying nozzle comprises a slit(130) formed with a pair of plates(110,120) for spraying a cleaning solution to a substrate. The cleaning solution and air for forming the cleaning solution into a mist state are supplied to the inside of the slit. A cleaning solution supplying line is connected with the center of one of the plates. An air supplying line is connected with a position which corresponding with a nozzle end for spraying the cleaning solution. The width of the slit is 0.05~0.1 millimeters. |
