<p>A processing system includes a guide member having a plurality of obliquely angled deflection surfaces for redirecting and reorienting a straying wafer towards a desired processing path.</p>
申请公布号
WO2010059205(A1)
申请公布日期
2010.05.27
申请号
WO2009US06174
申请日期
2009.11.18
申请人
BAKER SOLAR, INC.;VITTUM, TROY;CHILSON, MICHAEL;ROITER, STEPHEN H.
