| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an optical filter capable of correcting the transmittance of light greatly, an optical system and an exposure apparatus. <P>SOLUTION: The optical filter 1A, which allows incident light to be transmitted therethrough to have an illuminance distribution corrected, is provided with: a glass substrate 10; an antireflection film 20A which is arranged on a first area 12A of the glass substrate 10 and contains an MgF<SB>2</SB>layer 22; and an adjustment film 30A which is arranged on a second area 14A of the glass substrate 10 and contains an LaF<SB>3</SB>layer 32. <P>COPYRIGHT: (C)2010,JPO&INPIT |
