发明名称 |
STRUCTURE FACTOR TENSOR ELEMENT DETERMINATION METHOD, AND X-RAY DIFFRACTION DEVICE UTILIZATION METHOD THEREFOR |
摘要 |
<p><P>PROBLEM TO BE SOLVED: To solve various problems existing in the case of using an ellipsometric crystal for quick determination of a structure factor tensor and improvement of measurement sensitivity, though an ellipsometric method of an X-ray domain which is necessary for determining the structure factor tensor of a material is already proposed. <P>SOLUTION: In this method, the structure factor tensor can be determined without using the ellipsometric crystal, by measuring and analyzing incidence polarization dependency of scattered X-ray intensity from a sample. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
申请公布号 |
JP2010117365(A) |
申请公布日期 |
2010.05.27 |
申请号 |
JP20100027415 |
申请日期 |
2010.02.10 |
申请人 |
JAPAN SYNCHROTRON RADIATION RESEARCH INST;RIGAKU CORP |
发明人 |
OSUMI HIROYUKI;TAKADA MASAKI;SUEMATSU HIROHITO;FUJINAWA TAKESHI |
分类号 |
G01N23/20 |
主分类号 |
G01N23/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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