| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a grid structure having a high aspect ratio and a shape applicable to various objects, and a method of manufacturing the grid structure for easily preparing the grid structure even when the size of the grid structure exceeds a wafer size. Ž<P>SOLUTION: A plurality of narrow and linear projecting parts 2 are formed on the surface of an optically transparent support body 1 so that they are arranged in parallel with each other at a constant pitch, for example. Metal material is deposited as a functional material from an oblique direction, metal filaments 6 are formed as functional members for covering the top surfaces and side surfaces of the projecting parts 2, and a wire grid diffraction grating 10 is prepared as the grid structure. Such functional members are hollow and are simply thin layers for covering the projecting parts 2, while they effectively function similarly to a solid functional member and are prepared more easily than the solid functional member. Using various materials other than the metal material as the functional material allows achievement of various functional elements. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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