| 摘要 |
<P>PROBLEM TO BE SOLVED: To execute spectroscopic analysis by using only one type of a multilayer mirror without the need of moving a specimen and an X-ray source when spectroscopic analysis is executed by switching two kinds of wavelengths. Ž<P>SOLUTION: The X-ray source allowing an X ray of a first wavelength and an X ray of a second wavelength to be extracted from the same focal spot F is employed. The multilayer mirror 102 has a variable curvature. When the X ray of the first wavelength is extracted as a parallel X-ray beam, a reflection face of the multilayer mirror 102 is curved along a first parabola 98, and the focal spot F of the X-ray source is positioned at the focal position of the reflection face. When the X ray of the second wavelength is extracted, a reflection face of the multilayer mirror 102 is curved along a second parabola 100, and the focal spot F of the X-ray source is positioned at the focal position of the reflection face. In the above two stages of spectral analysis, the X-ray source is located at the same position and holds the same posture, and an emission slit 104 is located at the same position even though the position and posture of the multilayer mirror 102 are changed. Thus, the parallel X-ray beam can be extracted at the same position in the same direction in the two stages of spectroscopic analysis. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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