| 摘要 |
Provided is a self displacement sensing cantilever, including: a cantilever (4) that has a probe (2) at its tip and has a distal end portion (3) at its distal end; a displacement detecting portion (5) that is provided to the cantilever (4), for detecting a displacement of the cantilever (4); an electrode portion (6) that is connected to the displacement detecting portion (5) and is communicated with the distal end portion (3); and an insulation film (7) that is formed over at least one of the electrode portion (6) and the displacement detecting portion (5) of the cantilever (4), in which the insulation film (7) is applied a coating of an arbitrary functional material (8). As a result, measurement with a scanning probe microscope may be performed at the same time as projecting light.
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