GASENTLADUNGSQUELLE, INSBESONDERE FÜR EUV-STRAHLUNG,申请号DE20066013621T-传众专利搜索

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发明名称	GASENTLADUNGSQUELLE, INSBESONDERE FÜR EUV-STRAHLUNG
摘要
申请公布号	DE602006013621(D1)	申请公布日期	2010.05.27
申请号	DE20066013621T	申请日期	2006.05.08
申请人	PHILIPS INTELLECTUAL PROPERTY & STANDARDS GMBH	发明人	NEFF, JAKOB WILLI;PRUEMMER, RALF
分类号	H05G2/00	主分类号	H05G2/00
代理机构		代理人
主权项
地址

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