| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a dispersion plate having excellent heat resistance and corrosion resistance which can maintain satisfactory fluidization conditions even when being used under severe conditions such as a case where silicon halide and aluminum are reacted in a fluidized bed reactor so as to produce silicon. Ž<P>SOLUTION: The dispersion plate made of ceramics is used for passing a gas into a fluidized bed reactor in a dispersed state. Further, in a fluidized bed reactor used for producing silicon using silicon halide as the raw material, the dispersion plate made of ceramic is fitted to the inflow part of a silicon halide-containing gas and used for passing the gas into the fluidized bed reactor in a dispersed state. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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